Lund Nano Lab is a modern cleanroom facility, inagurated in January 2007. The cleanroom is used for the following purpose:
- epitaxial growth of III-V semiconductors
- processing and characterization of nanostructures
- fabrication of prototype devices
The Lund Nano Lab is devided into 2 parts: Nano-process lab (level 1) and Nano-epitaxy lab (level 2), which are connected via a cleanroom staircase. The Nano-process lab which is ISO 5 cleanroom environment, is used mostly for processing of nanostructures and includes different patterning techniques, such as electron beam lithography, nanoimprint, focused ion beams and others. The Nano-epitaxy lab (ISO 7 cleanroom standard) is used mostly for epitaxial growth by metalorganic vapor phase epitaxy and chemical beam epitaxy, but also for characterization of the grown structures. The Nano-epitaxy lab is integrated with the existing Berzelius laboratory into a common cleanroom area.
The Lund Nano Lab folder can be downloaded
here (pdf-format).
The Nano-process lab has about 150 sq.m cleanroom area which is devided into three parts: EBL-, Evaporation- and UV-lithography laboratories, see pictures below.
Fig. 1 Combined Focused Ion Beam/Scanning Electron Microscopy (FIB/SEM) system FEI Nova NanoLab 600 for high-resolution SEM inspection and ion-beam patterning.
Fig. 2 Thermal evaporation systems installed in the Evaporation lab (EVA-lab).
Fig. 3. UV-lithography laboratory. Nanoimprint machine (6 inch nanoimprinter from Obducat AB) visible on the left.
The Nano-epitaxy laboratory (about 110 sq. m) consists of 4 rooms on level 2, the epitaxial equipment include Aixtron AIX200 MOVPE machine and ThomasSwan CCS system for the nitride growth. The characterization equipment (FE-SEM and AFM) is conveniently placed close to the growth machines, see the pictures below.
Fig. 4 Aixtron AIX 200 epitaxial system for growth of III-V nanowires.
Fig.5 High resolution scanning electron microscope JSM 6400F.
The complete list of equipment installed in the Lund Nano Lab cleanrooms is available at the laboratory information and management system
LIMS.
If you have any questions regarding the Lund Nano Lab cleanroom, installed equipment or available processes, please contact the Head of Nano-process lab,
Dr Ivan Maximov.
If you are interested in lab access and equipment fees and other similar questions, please contact the Lab Manager
Dr Peter Ramvall.
Updated by
Ivan Maximov, 2010-01-14
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